Handy type measuring tool of resistivity / sheet ressistance by eddy current method (Non-damage)

Selling Points

NON-Contact type
NON-Contact type

Auto-measurement start by probe head contacting to sample
3 measurement modes for wafer resistivity, bulk resistivity and sheet resistance
Easy set up to measurement condition by JOG dial
5 types of model for each measuring range
Resistivity probe can be changed by sample’s resistivity range




  • Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
  • Conductive thin film (Metal, ITO etc)
  • Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
  • Others (*Please contact us for details)

Sample sizes

Any size and shape can be measured(*Larger than 20mmφ and measurement plane must be flat)

Measuring range

[R] 1m ~ 200Ω・cm
[RS] 10m ~ 3,000Ω/sq
*The range is separated from each Low, Middle, High S-High, Solar-wafer probe type.

*Please refer the measurement range for each probe type as below;
(5)Solar Wafer:5~500Ω/□(0.2~15Ω·cm)


  • Main unit: W255 x D275 x H95mm, 4kg.
  • Probe: 20 mm dia. x 80 mm.

Non-Contact type resistance measurement
Manual (1 point measurement)

Product Information

Non-Contact type resistance measurement

Products Lineups

Measurement principles & methods of Resistance Download by PDF file

*If you want PDF file [Measurement principles & methods of Resistance], please click here.