4 point probe head
Cartridge type, Cylindrical type, Miniature type, Cartridge with 6-way connector socket type

Selling Points

Napson 4 point resistivity / sheet resistance systems are using high performance probe heads which are made by Jandel Engineering Limited of England.

Jandel probe head performs high precise measurement of resistivity and sheet resistance for silicon wafers, epitaxial layers, diffusion layers, ITO layers, metal layers and more, so that Jandel probes have a good evaluation for many years.

  • *Load (needle pressure) is always suitable since using V type spring
  • *Probe spacing accuracy and probe stability is excellent since anodized aluminum alloy upper and lower guides are jeweled
  • *Less damage of probe needle tips – Solid tungsten carbide needles for superior durability



The probe type is chosen under the material of measuring sample, the surface state, the form etc.

Measurement sample Probe head
Silicon Ingots / Block TC-40u 200g
Silicon Slice TC-40u 200g
Epitaxial Layers TC-150u 100g
Epitaxial Layers (Thin film) TC-150u, 500u 50g
Shallow Diffused -layers (Thin film) OS-200u, 500u 50g
Diffused Layers OS-200u, TC-150u 100g
Ion Implantation TC-150u 50g, 100g
Metal (Thin film) TC-150u, 500u 25g, 50g, 100g
ITO layer TC-150u, 500u 25g, 50g, 100g
  • The other types are available.
  • If you would like to have a special spec, contact us.

e.g) TC-40u-200g/1.00mm

  • Needle Material: TC [Tungsten carbide] (or OS: Osmium alloy)
  • Radius: 40 um (25 um to 500 um)
  • Loads (g/needle): 200g (10g to 250g)
  • Spacing: 1.00 mm (0.5 mm to 1.59 mm)
  • Arrangement: Linear (standard) (Square is available)

Product Information

Products Lineups

Measurement principles & methods of Resistance Download by PDF file

*If you want PDF file [Measurement principles & methods of Resistance], please click here.