NRW series
Resistivity Reference Wafer
Selling Points
NRW series are resistivity reference wafers which proven by Napson’s resistivity measurement system. NRW series use wafers with neutron irradiation, and excellent stability.
Napson’s four-probe resistivity measurement system has been calibrated by standard wafers (NIST, VLSI), and conforms to the standards stipulated by the following SEMI standards, Japanese Industrial Standards (JIS) and American Materials Testing Association (ASTM).
〈Compliance standards〉
[SEMI Standards]
SEMI-MF43-99, SEMI-MF374-02, SEMI-MF84-02, SEMI-MF1529-02
[American Society for Testing and Materials]
ASTM-F-84-99(SEMI-MF84), ASTM-F-374-00a, ASTM-F-390-11, ASTM-F-1529-97
[Japan Industrial Standards]
JIS-H-0602-1995
Details
共通仕様
- 〈Material〉Silicon
- 〈Production method〉FZ
- 〈Wafer finish frontside/backside〉Lapped
- 〈Wafer orientation〉(1-1-1) ± 1 deg.
- 〈Doping〉N-type (Phosphorous)
- 〈Wafer size〉Φ100mm(4inch)
- 〈Wafer Thickness〉*Depends on NRW wafer type. Please refer following specs.
ウエハラインナップ／仕様
| Types | Resistivity (Ohm.cm) |
Thickness （µm） |
Sheet resistance （Ohm/sq） *calculated value |
|---|---|---|---|
| NRW-1-28 | 28.00 ±2.00 | 559.00 ±25.00 | Approx. 500 |
| NRW-2-110 | 110.00 ±11.00 | 580.00 ±10.00 | Approx. 2000 |
| NRW-3-200 | 200.00 ±12.00 | 675.00 ±25.00 | Approx. 3000 |
| NRW-4-330 | 330.00 ±25.00 | 675.00 ±25.00 | Approx. 5000 |
| NRW-5-550 | 550.00 ±50.00 | 450.00 ±25.00 | Approx. 12000 |
Guaranteed accuracy of Resistivity
| Guaranteed position | Accuracy |
|---|---|
| Center area （*φ5mm spot from sample center） |
± 3 % |
*Napson’s evaluation criteria conditions / guarantee accuracy under the environment
