Handy type measuring tool of resistivity / sheet ressistance by eddy current method (Non-damage)

Selling Points

NON-Contact type
NON-Contact type

Easy operation and compact design
Auto-measurement start by inserting a wafer under the probe
Easy set up to measurement condition by JOG dial
5 types of model for each measuring range



  • Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
  • Conductive thin film (Metal, ITO etc)
  • Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
  • Others (*Please contact us for details)

Sample sizes

~8 inch, ~156x156mm

Measuring range

[R] 1m ~ 200Ω・cm
[RS] 10m ~ 3,000Ω/sq
*The range is separated from each Low, Middle, High and S-High probe type.

*Please refer the measurement range for each probe type as below;
(1) Low:0.01~0.5Ω/□(0.001~0.05Ω‐cm) (2) Middle:0.5~10Ω/□ (0.05~0.5Ω‐cm) (3) High:10~1000Ω/□(0.5~60Ω‐cm) (4) S-High:1000~3000Ω/□(60~200Ω‐cm)


W220 ×D325 ×H210mm
Approx. 6.5kg

Non-Contact type resistance measurement
Manual (1 point measurement)

Product Information

Non-Contact type resistance measurement

Products Lineups

Measurement principles & methods of Resistance Download by PDF file

*If you want PDF file [Measurement principles & methods of Resistance], please click here.