PRODUCTS

EC-80
Handy type measuring tool of resistivity / sheet ressistance by eddy current method (Non-damage)

Selling Points

1POINT

NON-Contact type

Easy operation and compact design
Auto-measurement start by inserting a wafer under the probe
Easy set up to measurement condition by JOG dial
5 types of model for each measuring range

Details

Applications

• Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
• New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
• Conductive thin film (Metal, ITO etc)
• Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
• Others (*Please contact us for details)

Sample sizes

~8 inch, ~156x156mm

Measuring range

[R] 1m ~ 200Ω・cm
[RS] 10m ~ 3,000Ω/sq
*The range is separated from each Low, Middle, High and S-High probe type.

*Please refer the measurement range for each probe type as below;
(1) Low：0.01～0.5Ω/□（0.001～0.05Ω‐cm） (2) Middle：0.5～10Ω/□ （0.05～0.5Ω‐cm） (3) High：10～1000Ω/□（0.5～60Ω‐cm） (4) S-High：1000～3000Ω/□（60～200Ω‐cm）

Size

W220 ×D325 ×H210mm
Approx. 6.5kg

Non-Contact type resistance measurement
Manual (1 point measurement)

EC-80P（Portable）

Handy type measuring tool of resistivity / sheet ressistance by eddy current method (Non-damage)

DUORES

Handy type sheet resistance measuring tool [compatible both 4 point probe method and non-destructive (eddy current method) probes]

PVE-80

Simple measuring instrument for ultra low measurement range by pulse-Voltage excitation method (Non-contact)

Product Information

Non-Contact type resistance measurement

• Semi-automatic (Multi point measurement)
• Fully automatic (with sample transfer system)
• Built-in module

Products Lineups

• Contact type resistance measurement
• Non-Contact type resistance measurement
• Lifetime measurement
• Flatness/Thickness measurement
• Spreading resistance measurement
• PN type checker
• 4 point probe head
• Resistivity Reference wafer