Built-in module of resistivity for semicoductor by eddy current method (Non-contact)

Selling Points

NON-Contact type
NON-Contact type
PC & Software
PC & Software
In-line module
In-line module

Possible to measure sheet resistance without contact by Max. 3 types of probes
Suitable for production line and tranceportation system
Connect to host PC by LAN to send measurement command and data



  • Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
  • Conductive thin film (Metal, ITO etc)
  • Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
  • Others (*Please contact us for details)

Sample sizes

2 ~ 8 inch, ~156x156mm
(Option; ~12 inch, ~210x210mm)

Measuring range

[R] 1m ~ 200 Ω・cm (NC-110PV : 0.2 ~ 20 Ω・cm for solar wafer)
[RS] 10m ~ 3,000 Ω/sq
* The range is separated from each Low, Middle, High and S-High probe type.

*Please refer the measurement range for each probe type as below;

Non-Contact type resistance measuremen
Built-in module

Product Information

Non-Contact type resistance measurement

Products Lineups

Measurement principles & methods of Resistance Download by PDF file

*If you want PDF file [Measurement principles & methods of Resistance], please click here.