WS-3000
Fully automatic measurement system for semiconductor process evaluation (thin film) by 4 point probe method
Selling Points
Automatic probe head selection(exchanger) among 4 kinds of probe head
[No need to exchange a probe head by each different sample measurement]
Edge 1mm measurement is available by dual meas. mode
High cost performance from high speed measurement
FOUP compatible, GEM / SECS compatible
Details
Applications
- Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
- Conductive thin film (Metal, ITO etc)
- Diffused sample (or layer)
- Silicon-related epitaxial materials, Ion-implantation sample
- Others (*Please contact us for details)
Sample sizes
~300mm (and/or Optional 200mm)
Measuring range
[RS] 1m~10M Ω/sq
Size
RT-3000: 約W250×D323×H135 mm
Approx. 6kg
