PRODUCTS

WS-8800
Fully automatic sorting system with transport robot by 4 point probe method

  • WS-8800
  • WS-8800

Selling Points

MULTI POINT
MULTI POINT
Contact type
Contact type
PC & Software
PC & Software
Full Automatic
Full Automatic

Measurement of resistivity, thickness, conductivity(P/N) and temperature
Tester self-test function, wide measuring range
Thickness, measurement position and temperature correction function for silicon resistivity
Number of cassette station can be changed by customers request
Host (CIM) communication and SMIF or FOUP compatible

Video

Details

Applications

  • Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • Others (*Please contact us for details)

Sample sizes

3 ~ 8 inch (or 12 inch)

Measuring range

[R] 100μ~1M Ω・cm
[RS] 1m~10M Ω/sq

Contact type resistance measurement
Fully automatic (with sample transfer system)

WS-3000
WS-3000

Fully automatic measurement system for semiconductor process evaluation (thin film) by 4 point probe method
RT-3000/RG-2000AL(RG-3000AL)
RT-3000/RG-2000AL(RG-3000AL)

Fully automatic system with one cassette station by 4 point probe method
RT-3000/RS-1300
RT-3000/RS-1300

Global standard fully automatic measurement system in the flat panel field by 4 point probe method

Product Information

Contact type resistance measurement

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