Semi-automatic measuring instrument of Ultra-high range sheet resistance by corona discharge method (Non-contact)
Ultra-High range sheet resistance measurement for 10E+9 ~ 10E+15 ohm/sq without contacting
Mapping program software;
1. Arranged in a multipoint pattern measurement is programmed
2. 2-D & 3-D mapping software
Easy operation by Windows 7 system software
Measurement data base link with Excel via CSV format file
Unaffected by contact resistance
*Corona Discharge Method : Pat. No.5510629
Joint development with Yamagata Univ.
(Associate Professor : Dr. Toshiyuki Sugimoto)
Any sample within the measurement range can be measured.
- Thin film layer (a-Si, IGZO etc)
- Coating material
- Semiconductor material
- Approximate material as Insulator
Please contact us for details.
Size : Max. 300 x 400 mm (or more)
Thickness : Max. 2 mm
*We can design as your requirement. Please contact us for customize.
10E+9 ~ 10E+15 ohm/sq