Semi-automatic measuring instrument of Ultra-high range sheet resistance by corona discharge method (Non-contact)

Selling Points

NON-Contact type
NON-Contact type
PC & Software
PC & Software

Ultra-High range sheet resistance measurement for 10E+9 ~ 10E+15 ohm/sq without contacting
Mapping program software;
1. Arranged in a multipoint pattern measurement is programmed
2. 2-D & 3-D mapping software
Easy operation by Windows 7 system software
Measurement data base link with Excel via CSV format file
Unaffected by contact resistance

*Corona Discharge Method : Pat. No.5510629
Joint development with Yamagata Univ.
(Associate Professor : Dr. Toshiyuki Sugimoto)




Any sample within the measurement range can be measured.

  • Thin film layer (a-Si, IGZO etc)
  • Coating material
  • Semiconductor material
  • Approximate material as Insulator

Please contact us for details.

Sample sizes

Size : Max. 300 x 400 mm (or more)
Thickness : Max. 2 mm
*We can design as your requirement. Please contact us for customize.

Measuring range

10E+9 ~ 10E+15 ohm/sq

Non-Contact type resistance measurement
Semi-automatic (Multi point measurement)

Product Information

Non-Contact type resistance measurement

Products Lineups

Measurement principles & methods of Resistance Download by PDF file

*If you want PDF file [Measurement principles & methods of Resistance], please click here.