PRODUCTS

NC-600MAP
Measurement system with one cassette station of sesistivity / sheet resistnace by eddy current method (Non-cntact)

Features

MULTI POINT

NON-Contact type

PC & Software

Full Automatic

Possible to measure wide range of sheet resistance by installing Max. 4 probes
Min. 7 mm position from edge can be measured
User programable measurement pattern & programmable measuring pattern
Equipped with one cassette station to improve work efficiency (storage in the same slot after measurement)
*Option: thickness measurement probe (for silicon wafer)

Video

Details

Sample sizes

3～8inch

Measuring range

[R] 1m ~ 200Ω・cm
[RS] 10m ~ 3,000Ω/sq
* The range is separated from each Low, Middle, High and S-High probe type.

*Please refer the measurement range for each probe type as below;
（1）Low：0.01～0.5Ω/□（0.001～0.05Ω·cm）
（2）Middle：0.5～10Ω/□（0.05～0.5Ω·cm）
（3）High：10～1000Ω/□（0.5～60Ω·cm）
（4）S-High：1000～3000Ω/□（60～200Ω·cm）

Non-Contact type resistance measurement
Fully automatic (with sample transfer system)

NC-6800FLA

Fully automatic belt transfer sorting system by eddy current method (Non-contact)

NC-2000FLA

Fully automatic robot transfer sorting system of resistivity and flatness by eddy current/capacitance method (Non-contact)

Product Information

Non-Contact type resistance measurement

• Manual (1 point measurement)
• Semi-automatic (Multi point measurement)
• Built-in module

Products Lineups

• Contact type resistance measurement
• Non-Contact type resistance measurement
• Lifetime measurement
• Flatness/Thickness measurement
• Spreading resistance measurement
• PN type checker
• 4 point probe head
• Resistivity Reference wafer