PRODUCTS

NC-2000FLA
Fully automatic robot transfer sorting system of resistivity and flatness by eddy current/capacitance method (Non-contact)

Features

MULTI POINT

NON-Contact type

PC & Software

Full Automatic

Non-contact measurement of resistivity, Flatness (thickness) and conductivity (P/N)
Number of cassette station can be changed by customers request
Eddy current method for resistivity, Electric capacitance method for wafer thickness
Temperature correction function for silicon wafer

Video

Details

Sample sizes

3～8inch

Measuring range

[R] 1m ~ 200Ω・cm
[RS] 10m ~ 3,000 Ω/sq
* The range is separated from each Low, Middle, High and S-High probe type.

*Please refer the measurement range for each probe type as below;
（1）Low：0.01～0.5Ω/□（0.001～0.05Ω·cm）
（2）Middle：0.5～10Ω/□（0.05～0.5Ω·cm）
（3）High：10～1000Ω/□（0.5～60Ω·cm）
（4）S-High：1000～3000Ω/□（60～200Ω·cm）

Non-Contact type resistance measurement
Fully automatic (with sample transfer system)

NC-6800FLA

Fully automatic belt transfer sorting system by eddy current method (Non-contact)

NC-600MAP

Measurement system with one cassette station of sesistivity / sheet resistnace by eddy current method (Non-cntact)

Product Information

Non-Contact type resistance measurement

• Manual (1 point measurement)
• Semi-automatic (Multi point measurement)
• Built-in module

Products Lineups

• Contact type resistance measurement
• Non-Contact type resistance measurement
• Lifetime measurement
• Flatness/Thickness measurement
• Spreading resistance measurement
• PN type checker
• 4 point probe head
• Resistivity Reference wafer