PRODUCTS

RT-3000/RG-2000(RG-3000)
Semi-automatic / wide range measuring instrument of resistivity / sheet resistance by 4 point probe method

Selling Points

MULTI POINT

Contact type

PC & Software

Widest measuring range in the world and High accuracy measurement for semiconductor
User programmable measurement pattern
Tester self-test function
Thickness, edge, temperature correction for silicon wafer
Film thickness conversion function from sheet resistance

Details

Applications

• Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
• New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
• Conductive thin film (Metal, ITO etc)
• Diffused sample (or layer)
• Silicon-related thin films (LTPS etc), IGZO
• Silicon-related epitaxial materials, Ion-implantation sample
• Others (*Please contact us for details)

Sample sizes

WS-8800 : ~ 8 inch, ~156x156mm
-Option(Large size stage: Model RG-3000); ~12 inch, ~210x210mm

WS-3000 : 3~12 inch (and/or Optional 8 inch)

Measuring range

1. RT-3000/S version;
[R] 100μ~1M Ω・cm
[RS] 1m~10M Ω/sq

2. RT-3000/H version;
［RS] 10mΩ/sq?1GΩ/sq

Size

RT-3000: W250 x D323 x H135 mm
Approx. 6kg

RG-2000: W1,020 x D490 x H408 mm
Approx. 90kg
RG-3000: W935×D564×H471mm
Approx. 95kg

Contact type resistance measurement
Semi-automatic (Multi point measurement)

Cresbox

Semi-automatic / small foot print measuring instrument of resistivity / sheet resistance by 4 point probe method

RG-200PV

Semi-automatic measuring instrument of resistivity / sheet resistance for solar cell by 4 point probe method

Product Information

Contact type resistance measurement

• Manual (1 point measurement)
• Fully automatic (with sample transfer system)

Products Lineups

• Contact type resistance measurement
• Non-Contact type resistance measurement
• Lifetime measurement
• Flatness/Thickness measurement
• Spreading resistance measurement
• PN type checker
• 4 point probe head
• Resistivity Reference wafer